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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/jim/WeiW24>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dazhong_Wu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yupeng_Wei>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2Fs10845-022-02040-w>
foaf:homepage <https://doi.org/10.1007/s10845-022-02040-w>
dc:identifier DBLP journals/jim/WeiW24 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2Fs10845-022-02040-w (xsd:string)
dcterms:issued 2024 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/jim>
rdfs:label Material removal rate prediction in chemical mechanical planarization with conditional probabilistic autoencoder and stacking ensemble learning. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dazhong_Wu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yupeng_Wei>
swrc:month January (xsd:string)
swrc:number 1 (xsd:string)
swrc:pages 115-127 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/jim/WeiW24/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/jim/WeiW24>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/jim/jim35.html#WeiW24>
rdfs:seeAlso <https://doi.org/10.1007/s10845-022-02040-w>
dc:title Material removal rate prediction in chemical mechanical planarization with conditional probabilistic autoencoder and stacking ensemble learning. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 35 (xsd:string)