A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/jirs/YangGN03
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2003
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A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication.
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43-68
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microassembly; microrobotics; microgripper design; computer vision; hybrid MEMS; MEMS fabrication
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A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication.
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