Transformation and Mechanical Properties of TiNi Thin Films Sputter Deposited at Various Argon Pressures for Micromachine Actuators.
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Transformation and Mechanical Properties of TiNi Thin Films Sputter Deposited at Various Argon Pressures for Micromachine Actuators.
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Transformation and Mechanical Properties of TiNi Thin Films Sputter Deposited at Various Argon Pressures for Micromachine Actuators.
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