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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/jsait/AgarwalPG23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Akshay_Agarwal>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Minxu_Peng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Vivek_K._Goyal>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FJSAIT.2023.3283911>
foaf:homepage <https://doi.org/10.1109/JSAIT.2023.3283911>
dc:identifier DBLP journals/jsait/AgarwalPG23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FJSAIT.2023.3283911 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/jsait>
rdfs:label Continuous-Time Modeling and Analysis of Particle Beam Metrology. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Akshay_Agarwal>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Minxu_Peng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Vivek_K._Goyal>
swrc:pages 61-74 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/jsait/AgarwalPG23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/jsait/AgarwalPG23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/jsait/jsait4.html#AgarwalPG23>
rdfs:seeAlso <https://doi.org/10.1109/JSAIT.2023.3283911>
dc:title Continuous-Time Modeling and Analysis of Particle Beam Metrology. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 4 (xsd:string)