Single-chip surface micromachined integrated gyroscope with 50¬į/h Allan deviation.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/jssc/GeenSCL02
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2002
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Single-chip surface micromachined integrated gyroscope with 50¬į/h Allan deviation.
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Single-chip surface micromachined integrated gyroscope with 50¬į/h Allan deviation.
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