[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/micromachines/EsashiT16>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Masayoshi_Esashi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shuji_Tanaka>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fmi7080137>
foaf:homepage <https://doi.org/10.3390/mi7080137>
dc:identifier DBLP journals/micromachines/EsashiT16 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fmi7080137 (xsd:string)
dcterms:issued 2016 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/micromachines>
rdfs:label Stacked Integration of MEMS on LSI. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Masayoshi_Esashi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shuji_Tanaka>
swrc:number 8 (xsd:string)
swrc:pages 137 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/micromachines/EsashiT16/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/micromachines/EsashiT16>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/micromachines/micromachines7.html#EsashiT16>
rdfs:seeAlso <https://doi.org/10.3390/mi7080137>
dc:title Stacked Integration of MEMS on LSI. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 7 (xsd:string)