In-Plane MEMS Shallow Arch Beam for Mechanical Memory.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/micromachines/HafizKRCY16
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In-Plane MEMS Shallow Arch Beam for Mechanical Memory.
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In-Plane MEMS Shallow Arch Beam for Mechanical Memory.
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