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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/micromachines/LuZJHZS16>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Guofu_Zhou>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Han_Lu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hua_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lingling_Shui>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mingliang_Jin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tao_He>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fmi7020019>
foaf:homepage <https://doi.org/10.3390/mi7020019>
dc:identifier DBLP journals/micromachines/LuZJHZS16 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fmi7020019 (xsd:string)
dcterms:issued 2016 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/micromachines>
rdfs:label Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Guofu_Zhou>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Han_Lu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hua_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lingling_Shui>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mingliang_Jin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tao_He>
swrc:number 2 (xsd:string)
swrc:pages 19 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/micromachines/LuZJHZS16/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/micromachines/LuZJHZS16>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/micromachines/micromachines7.html#LuZJHZS16>
rdfs:seeAlso <https://doi.org/10.3390/mi7020019>
dc:title Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 7 (xsd:string)