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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/micromachines/NgoMMKEL16>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Biswajit_Mukhopadhyay>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ha-Duong_Ngo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kevin_Kr%E2%88%9A%E2%88%82hnert>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Klaus-Dieter_Lang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Oswin_Ehrmann>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Piotr_Mackowiak>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fmi7100193>
foaf:homepage <https://doi.org/10.3390/mi7100193>
dc:identifier DBLP journals/micromachines/NgoMMKEL16 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fmi7100193 (xsd:string)
dcterms:issued 2016 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/micromachines>
rdfs:label A WSi-WSiN-Pt Metallization Scheme for Silicon Carbide-Based High Temperature Microsystems. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Biswajit_Mukhopadhyay>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ha-Duong_Ngo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kevin_Kr%E2%88%9A%E2%88%82hnert>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Klaus-Dieter_Lang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Oswin_Ehrmann>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Piotr_Mackowiak>
swrc:number 10 (xsd:string)
swrc:pages 193 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/micromachines/NgoMMKEL16/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/micromachines/NgoMMKEL16>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/micromachines/micromachines7.html#NgoMMKEL16>
rdfs:seeAlso <https://doi.org/10.3390/mi7100193>
dc:title A WSi-WSiN-Pt Metallization Scheme for Silicon Carbide-Based High Temperature Microsystems. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 7 (xsd:string)