Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/micromachines/WangY15
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2015
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Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor.
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11
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1597-1605
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Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor.
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