Thermal and electrical performance investigation of FinFET with encased air-gap gate sidewalls from spacer encapsulation layer material and structure parameter perspectives.
Thermal and electrical performance investigation of FinFET with encased air-gap gate sidewalls from spacer encapsulation layer material and structure parameter perspectives.
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Thermal and electrical performance investigation of FinFET with encased air-gap gate sidewalls from spacer encapsulation layer material and structure parameter perspectives.
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