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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mj/MukhiyaBBLZ11>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Alvise_Bagolini>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Leandro_Lorenzelli>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/M._Zen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ravindra_Mukhiya>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/T._K._Bhattacharyya>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.mejo.2010.08.018>
foaf:homepage <https://doi.org/10.1016/j.mejo.2010.08.018>
dc:identifier DBLP journals/mj/MukhiyaBBLZ11 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.mejo.2010.08.018 (xsd:string)
dcterms:issued 2011 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mj>
rdfs:label Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Alvise_Bagolini>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Leandro_Lorenzelli>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/M._Zen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ravindra_Mukhiya>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/T._K._Bhattacharyya>
swrc:number 1 (xsd:string)
swrc:pages 127-134 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mj/MukhiyaBBLZ11/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mj/MukhiyaBBLZ11>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mj/mj42.html#MukhiyaBBLZ11>
rdfs:seeAlso <https://doi.org/10.1016/j.mejo.2010.08.018>
dc:title Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 42 (xsd:string)