[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mj/ZhouSZY04>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/B._Zhao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/F._G._Shi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/H._Zhou>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J._Yota>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.mejo.2004.03.004>
foaf:homepage <https://doi.org/10.1016/j.mejo.2004.03.004>
dc:identifier DBLP journals/mj/ZhouSZY04 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.mejo.2004.03.004 (xsd:string)
dcterms:issued 2004 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mj>
rdfs:label Effect of deposition methods on dielectric breakdown strength of PECVD low-k carbon doped silicon dioxide dielectric thin films. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/B._Zhao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/F._G._Shi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/H._Zhou>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J._Yota>
swrc:number 7 (xsd:string)
swrc:pages 571-576 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mj/ZhouSZY04/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mj/ZhouSZY04>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mj/mj35.html#ZhouSZY04>
rdfs:seeAlso <https://doi.org/10.1016/j.mejo.2004.03.004>
dc:title Effect of deposition methods on dielectric breakdown strength of PECVD low-k carbon doped silicon dioxide dielectric thin films. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 35 (xsd:string)