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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/ChenGSZNLT15>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Carole_Graas>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chunyan_Tian>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fen_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kai_Zhao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michael_A._Shinosky>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shreesh_Narasimha>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xiao_Hu_Liu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2015.09.017>
foaf:homepage <https://doi.org/10.1016/j.microrel.2015.09.017>
dc:identifier DBLP journals/mr/ChenGSZNLT15 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2015.09.017 (xsd:string)
dcterms:issued 2015 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Breakdown data generation and in-die deconvolution methodology to address BEOL and MOL dielectric breakdown challenges. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Carole_Graas>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chunyan_Tian>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fen_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kai_Zhao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michael_A._Shinosky>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shreesh_Narasimha>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xiao_Hu_Liu>
swrc:number 12 (xsd:string)
swrc:pages 2727-2747 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/ChenGSZNLT15/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/ChenGSZNLT15>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr55.html#ChenGSZNLT15>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2015.09.017>
dc:title Breakdown data generation and in-die deconvolution methodology to address BEOL and MOL dielectric breakdown challenges. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 55 (xsd:string)