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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/GrunwaldRHCKKSB16>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Eva_Gr%E2%88%9A%C4%BEnwald>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Franz_Schrank>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J%E2%88%9A%E2%88%82rdis_Rosc>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jochen_Kraft>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Matthias_Koch>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Peter_Czurratis>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ren%E2%88%9A%C2%A9_Hammer>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Roland_Brunner>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2016.07.075>
foaf:homepage <https://doi.org/10.1016/j.microrel.2016.07.075>
dc:identifier DBLP journals/mr/GrunwaldRHCKKSB16 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2016.07.075 (xsd:string)
dcterms:issued 2016 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Automatized failure analysis of tungsten coated TSVs via scanning acoustic microscopy. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Eva_Gr%E2%88%9A%C4%BEnwald>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Franz_Schrank>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J%E2%88%9A%E2%88%82rdis_Rosc>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jochen_Kraft>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Matthias_Koch>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Peter_Czurratis>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ren%E2%88%9A%C2%A9_Hammer>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Roland_Brunner>
swrc:pages 370-374 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/GrunwaldRHCKKSB16/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/GrunwaldRHCKKSB16>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr64.html#GrunwaldRHCKKSB16>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2016.07.075>
dc:title Automatized failure analysis of tungsten coated TSVs via scanning acoustic microscopy. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 64 (xsd:string)