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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/KhaledKBKANW17>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ahmad_Khaled>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ingrid_De_Wolf>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Luka_Kljucar>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michael_K%E2%88%9A%E2%88%82gel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Robert_Aertgeerts>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ruben_Nicasy>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sebastian_Brand>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2017.06.075>
foaf:homepage <https://doi.org/10.1016/j.microrel.2017.06.075>
dc:identifier DBLP journals/mr/KhaledKBKANW17 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2017.06.075 (xsd:string)
dcterms:issued 2017 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Study of GHz-SAM sensitivity to delamination in BEOL layers. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ahmad_Khaled>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ingrid_De_Wolf>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Luka_Kljucar>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michael_K%E2%88%9A%E2%88%82gel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Robert_Aertgeerts>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ruben_Nicasy>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sebastian_Brand>
swrc:pages 238-242 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/KhaledKBKANW17/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/KhaledKBKANW17>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr76.html#KhaledKBKANW17>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2017.06.075>
dc:title Study of GHz-SAM sensitivity to delamination in BEOL layers. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 76-77 (xsd:string)