Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/mr/KimLJKCJ08
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Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method.
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Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method.
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