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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/KimSY04>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chang_Seop_Song>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hae_Jeong_Yang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hyong_Tae_Kim>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2004.01.005>
foaf:homepage <https://doi.org/10.1016/j.microrel.2004.01.005>
dc:identifier DBLP journals/mr/KimSY04 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2004.01.005 (xsd:string)
dcterms:issued 2004 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label 2-Step algorithm for automatic alignment in wafer dicing process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chang_Seop_Song>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hae_Jeong_Yang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hyong_Tae_Kim>
swrc:number 7 (xsd:string)
swrc:pages 1165-1179 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/KimSY04/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/KimSY04>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr44.html#KimSY04>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2004.01.005>
dc:title 2-Step algorithm for automatic alignment in wafer dicing process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 44 (xsd:string)