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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/KingG09>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J._A._Gradner>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sean_W._King>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2009.04.006>
foaf:homepage <https://doi.org/10.1016/j.microrel.2009.04.006>
dc:identifier DBLP journals/mr/KingG09 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2009.04.006 (xsd:string)
dcterms:issued 2009 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Intrinsic stress fracture energy measurements for PECVD thin films in the SiOxCyNz: H system. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J._A._Gradner>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sean_W._King>
swrc:number 7 (xsd:string)
swrc:pages 721-726 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/KingG09/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/KingG09>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr49.html#KingG09>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2009.04.006>
dc:title Intrinsic stress fracture energy measurements for PECVD thin films in the SiOxCyNz: H system. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 49 (xsd:string)