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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/KozicHRSSSB18>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bernhard_Sartory>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Eva_Kozic>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Franz_Schrank>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J%E2%88%9A%E2%88%82rdis_Rosc>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Joerg_Siegert>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ren%E2%88%9A%C2%A9_Hammer>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Roland_Brunner>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2018.07.075>
foaf:homepage <https://doi.org/10.1016/j.microrel.2018.07.075>
dc:identifier DBLP journals/mr/KozicHRSSSB18 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2018.07.075 (xsd:string)
dcterms:issued 2018 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Metallization defect detection in 3D integrated components using scanning acoustic microscopy and acoustic simulations. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bernhard_Sartory>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Eva_Kozic>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Franz_Schrank>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J%E2%88%9A%E2%88%82rdis_Rosc>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Joerg_Siegert>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ren%E2%88%9A%C2%A9_Hammer>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Roland_Brunner>
swrc:pages 262-266 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/KozicHRSSSB18/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/KozicHRSSSB18>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr88.html#KozicHRSSSB18>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2018.07.075>
dc:title Metallization defect detection in 3D integrated components using scanning acoustic microscopy and acoustic simulations. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 88-90 (xsd:string)