Stress analysis of CMOS-MEMS microphone under shock loading by Taguchi method.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/mr/LuNY18
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Stress analysis of CMOS-MEMS microphone under shock loading by Taguchi method.
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Stress analysis of CMOS-MEMS microphone under shock loading by Taguchi method.
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