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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/LucatGCDM08>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Christophe_Castille>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Claude_Lucat>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Francis_M%E2%88%9A%C2%A9nil>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/H%E2%88%9A%C2%A9l%E2%88%9A%C2%AEne_Deb%E2%88%9A%C2%A9da>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Patrick_Ginet>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2008.03.016>
foaf:homepage <https://doi.org/10.1016/j.microrel.2008.03.016>
dc:identifier DBLP journals/mr/LucatGCDM08 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2008.03.016 (xsd:string)
dcterms:issued 2008 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Microsystems elements based on free-standing thick-films made with a new sacrificial layer process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Christophe_Castille>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Claude_Lucat>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Francis_M%E2%88%9A%C2%A9nil>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/H%E2%88%9A%C2%A9l%E2%88%9A%C2%AEne_Deb%E2%88%9A%C2%A9da>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Patrick_Ginet>
swrc:number 6 (xsd:string)
swrc:pages 872-875 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/LucatGCDM08/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/LucatGCDM08>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr48.html#LucatGCDM08>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2008.03.016>
dc:title Microsystems elements based on free-standing thick-films made with a new sacrificial layer process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 48 (xsd:string)