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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/NelhiebelWDTB05>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/A._Timmerer>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/E._Bertagnolli>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J._Wissenwasser>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michael_Nelhiebel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Thomas_Detzel>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2005.07.020>
foaf:homepage <https://doi.org/10.1016/j.microrel.2005.07.020>
dc:identifier DBLP journals/mr/NelhiebelWDTB05 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2005.07.020 (xsd:string)
dcterms:issued 2005 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Hydrogen-related influence of the metallization stack on characteristics and reliability of a trench gate oxide. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/A._Timmerer>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/E._Bertagnolli>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J._Wissenwasser>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michael_Nelhiebel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Thomas_Detzel>
swrc:number 9-11 (xsd:string)
swrc:pages 1355-1359 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/NelhiebelWDTB05/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/NelhiebelWDTB05>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr45.html#NelhiebelWDTB05>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2005.07.020>
dc:title Hydrogen-related influence of the metallization stack on characteristics and reliability of a trench gate oxide. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 45 (xsd:string)