FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding.
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/mr/OrainBFLJ07
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/H._Jaouen
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/J.-C._Barb%E2%88%9A%C2%A9
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/P._Legallo
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/S._Orain
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/X._Federspiel
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2006.09.018
>
foaf:
homepage
<
https://doi.org/10.1016/j.microrel.2006.09.018
>
dc:
identifier
DBLP journals/mr/OrainBFLJ07
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1016%2Fj.microrel.2006.09.018
(xsd:string)
dcterms:
issued
2007
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/mr
>
rdfs:
label
FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/H._Jaouen
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/J.-C._Barb%E2%88%9A%C2%A9
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/P._Legallo
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/S._Orain
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/X._Federspiel
>
swrc:
number
2-3
(xsd:string)
swrc:
pages
295-301
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/mr/OrainBFLJ07/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/mr/OrainBFLJ07
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/mr/mr47.html#OrainBFLJ07
>
rdfs:
seeAlso
<
https://doi.org/10.1016/j.microrel.2006.09.018
>
dc:
title
FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
47
(xsd:string)