[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/PlappertHKN12>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Angelika_Koprowski>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mathias_Nowottnick>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mathias_Plappert>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Oliver_Humbel>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2012.06.066>
foaf:homepage <https://doi.org/10.1016/j.microrel.2012.06.066>
dc:identifier DBLP journals/mr/PlappertHKN12 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2012.06.066 (xsd:string)
dcterms:issued 2012 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Characterization of Ti diffusion in PVD deposited WTi/AlCu metallization on monocrystalline Si by means of secondary ion mass spectroscopy. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Angelika_Koprowski>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mathias_Nowottnick>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mathias_Plappert>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Oliver_Humbel>
swrc:number 9-10 (xsd:string)
swrc:pages 1993-1997 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/PlappertHKN12/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/PlappertHKN12>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr52.html#PlappertHKN12>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2012.06.066>
dc:title Characterization of Ti diffusion in PVD deposited WTi/AlCu metallization on monocrystalline Si by means of secondary ion mass spectroscopy. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 52 (xsd:string)