[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/PoonGKMW01>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/A._M._Myasnikov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hei_Wong>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/M._C._Poon>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ted_Chi-Wah_Kok>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Y._Gao>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2FS0026-2714%2801%2900216-5>
foaf:homepage <https://doi.org/10.1016/S0026-2714(01)00216-5>
dc:identifier DBLP journals/mr/PoonGKMW01 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2FS0026-2714%2801%2900216-5 (xsd:string)
dcterms:issued 2001 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label SIMS study of silicon oxynitride prepared by oxidation of silicon-rich silicon nitride layer. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/A._M._Myasnikov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hei_Wong>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/M._C._Poon>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ted_Chi-Wah_Kok>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Y._Gao>
swrc:number 12 (xsd:string)
swrc:pages 2071-2074 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/PoonGKMW01/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/PoonGKMW01>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr41.html#PoonGKMW01>
rdfs:seeAlso <https://doi.org/10.1016/S0026-2714(01)00216-5>
dc:title SIMS study of silicon oxynitride prepared by oxidation of silicon-rich silicon nitride layer. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 41 (xsd:string)