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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/SaghaeianKSM18>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/F._Saghaeian>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J._Keckes>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/K._A._Schreiber>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/T._Mittereder>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2018.07.005>
foaf:homepage <https://doi.org/10.1016/j.microrel.2018.07.005>
dc:identifier DBLP journals/mr/SaghaeianKSM18 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2018.07.005 (xsd:string)
dcterms:issued 2018 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Design and development of MEMS-based structures for in-situ characterization of thermo-mechanical behaviour of thin metal films. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/F._Saghaeian>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J._Keckes>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/K._A._Schreiber>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/T._Mittereder>
swrc:pages 829-834 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/SaghaeianKSM18/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/SaghaeianKSM18>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr88.html#SaghaeianKSM18>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2018.07.005>
dc:title Design and development of MEMS-based structures for in-situ characterization of thermo-mechanical behaviour of thin metal films. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 88-90 (xsd:string)