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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/TomitaKYMUTFMI13>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hidehiko_Kimura>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hiroshi_Iwai>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/K._Maeda>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/M._Moritoki>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/M._Yasuda>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ryuji_Tomita>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/S._Ueno>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/T._Fujimoto>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/T._Tonegawa>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2012.12.011>
foaf:homepage <https://doi.org/10.1016/j.microrel.2012.12.011>
dc:identifier DBLP journals/mr/TomitaKYMUTFMI13 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2012.12.011 (xsd:string)
dcterms:issued 2013 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Improvement on sheet resistance uniformity of nickel silicide by optimization of silicidation conditions. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hidehiko_Kimura>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hiroshi_Iwai>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/K._Maeda>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/M._Moritoki>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/M._Yasuda>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ryuji_Tomita>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/S._Ueno>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/T._Fujimoto>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/T._Tonegawa>
swrc:number 5 (xsd:string)
swrc:pages 665-669 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/TomitaKYMUTFMI13/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/TomitaKYMUTFMI13>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr53.html#TomitaKYMUTFMI13>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2012.12.011>
dc:title Improvement on sheet resistance uniformity of nickel silicide by optimization of silicidation conditions. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 53 (xsd:string)