[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/UusluotoJLT04>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Aulis_Tuominen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Harri_Laaksonen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Paavo_Jalonen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Teija_Uusluoto>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2003.08.001>
foaf:homepage <https://doi.org/10.1016/j.microrel.2003.08.001>
dc:identifier DBLP journals/mr/UusluotoJLT04 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2003.08.001 (xsd:string)
dcterms:issued 2004 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Metallization of microvias by sputter-deposition. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Aulis_Tuominen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Harri_Laaksonen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Paavo_Jalonen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Teija_Uusluoto>
swrc:number 4 (xsd:string)
swrc:pages 587-593 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/UusluotoJLT04/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/UusluotoJLT04>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr44.html#UusluotoJLT04>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2003.08.001>
dc:title Metallization of microvias by sputter-deposition. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 44 (xsd:string)