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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/WangTGVSWWW11>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ann_Witvrouw>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/B._Guo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bo_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/G._Vereecke>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ingrid_De_Wolf>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Martine_Wevers>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shuji_Tanaka>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Simone_Severi>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2011.06.022>
foaf:homepage <https://doi.org/10.1016/j.microrel.2011.06.022>
dc:identifier DBLP journals/mr/WangTGVSWWW11 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2011.06.022 (xsd:string)
dcterms:issued 2011 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ann_Witvrouw>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/B._Guo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bo_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/G._Vereecke>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ingrid_De_Wolf>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Martine_Wevers>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shuji_Tanaka>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Simone_Severi>
swrc:number 9-11 (xsd:string)
swrc:pages 1878-1881 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/WangTGVSWWW11/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/WangTGVSWWW11>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr51.html#WangTGVSWWW11>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2011.06.022>
dc:title Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 51 (xsd:string)