Effects of the sputtering deposition process of metal gate electrode on the gate dielectric characteristics.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/mr/YamadaMHFE01
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/mr/YamadaMHFE01
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Koji_Eriguchi
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Masaru_Moriwaki
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Shinji_Fujii
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Takayuki_Yamada
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Yoshinao_Harada
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1016%2FS0026-2714%2800%2900262-6
>
foaf:
homepage
<
https://doi.org/10.1016/S0026-2714(00)00262-6
>
dc:
identifier
DBLP journals/mr/YamadaMHFE01
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1016%2FS0026-2714%2800%2900262-6
(xsd:string)
dcterms:
issued
2001
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/mr
>
rdfs:
label
Effects of the sputtering deposition process of metal gate electrode on the gate dielectric characteristics.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Koji_Eriguchi
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Masaru_Moriwaki
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Shinji_Fujii
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Takayuki_Yamada
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Yoshinao_Harada
>
swrc:
number
5
(xsd:string)
swrc:
pages
697-704
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/mr/YamadaMHFE01/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/mr/YamadaMHFE01
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/mr/mr41.html#YamadaMHFE01
>
rdfs:
seeAlso
<
https://doi.org/10.1016/S0026-2714(00)00262-6
>
dc:
title
Effects of the sputtering deposition process of metal gate electrode on the gate dielectric characteristics.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
41
(xsd:string)