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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/ZenkevichLSFBL07>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andrei_Zenkevich>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andrey_Baturin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/G._Scarel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Marco_Fanciulli>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/N._Lubovin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yu._Lebedinskii>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.microrel.2007.01.071>
foaf:homepage <https://doi.org/10.1016/j.microrel.2007.01.071>
dc:identifier DBLP journals/mr/ZenkevichLSFBL07 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.microrel.2007.01.071 (xsd:string)
dcterms:issued 2007 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Degradation kinetics of ultrathin HfO2 layers on Si(1 0 0) during vacuum annealing monitored with in situ XPS/LEIS and ex situ AFM. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andrei_Zenkevich>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andrey_Baturin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/G._Scarel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Marco_Fanciulli>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/N._Lubovin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yu._Lebedinskii>
swrc:number 4-5 (xsd:string)
swrc:pages 657-659 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/ZenkevichLSFBL07/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/ZenkevichLSFBL07>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr47.html#ZenkevichLSFBL07>
rdfs:seeAlso <https://doi.org/10.1016/j.microrel.2007.01.071>
dc:title Degradation kinetics of ultrathin HfO2 layers on Si(1 0 0) during vacuum annealing monitored with in situ XPS/LEIS and ex situ AFM. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 47 (xsd:string)