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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mr/ZhengSYF03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/B._Yu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/P._D._Foo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Y._J._Su>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Y._S._Zheng>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2FS0026-2714%2803%2900134-3>
foaf:homepage <https://doi.org/10.1016/S0026-2714(03)00134-3>
dc:identifier DBLP journals/mr/ZhengSYF03 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2FS0026-2714%2803%2900134-3 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mr>
rdfs:label Investigation of defect on copper bond pad surface in copper/low k process integration. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/B._Yu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/P._D._Foo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Y._J._Su>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Y._S._Zheng>
swrc:number 8 (xsd:string)
swrc:pages 1311-1316 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mr/ZhengSYF03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mr/ZhengSYF03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mr/mr43.html#ZhengSYF03>
rdfs:seeAlso <https://doi.org/10.1016/S0026-2714(03)00134-3>
dc:title Investigation of defect on copper bond pad surface in copper/low k process integration. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 43 (xsd:string)