Automatic defect classification for semiconductor manufacturing.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/mva/ChouRSWB97
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/mva/ChouRSWB97
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/A._Ravishankar_Rao
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Frederick_Y._Wu
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Martin_C._Sturzenbecker
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Paul_B._Chou
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Virginia_H._Brecher
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1007%2Fs001380050041
>
foaf:
homepage
<
https://doi.org/10.1007/s001380050041
>
dc:
identifier
DBLP journals/mva/ChouRSWB97
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1007%2Fs001380050041
(xsd:string)
dcterms:
issued
1997
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/mva
>
rdfs:
label
Automatic defect classification for semiconductor manufacturing.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/A._Ravishankar_Rao
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Frederick_Y._Wu
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Martin_C._Sturzenbecker
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Paul_B._Chou
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Virginia_H._Brecher
>
swrc:
number
4
(xsd:string)
swrc:
pages
201-214
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/mva/ChouRSWB97/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/mva/ChouRSWB97
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/mva/mva9.html#ChouRSWB97
>
rdfs:
seeAlso
<
https://doi.org/10.1007/s001380050041
>
dc:
subject
Machine vision; Process control; Defects; Classification; Semiconductor manufacturing
(xsd:string)
dc:
title
Automatic defect classification for semiconductor manufacturing.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
9
(xsd:string)