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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mva/GuanXL03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hong_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Pin_Xie>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sheng_Uei_Guan>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2Fs00138-002-0086-x>
foaf:homepage <https://doi.org/10.1007/s00138-002-0086-x>
dc:identifier DBLP journals/mva/GuanXL03 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2Fs00138-002-0086-x (xsd:string)
dcterms:issued 2003 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mva>
rdfs:label A golden-block-based self-refining scheme for repetitive patterned wafer inspections. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hong_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Pin_Xie>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sheng_Uei_Guan>
swrc:number 5 (xsd:string)
swrc:pages 314-321 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mva/GuanXL03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mva/GuanXL03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mva/mva13.html#GuanXL03>
rdfs:seeAlso <https://doi.org/10.1007/s00138-002-0086-x>
dc:subject Wafer inspection; Golden template; PDI; Image-to-image reference method; Golden block (xsd:string)
dc:title A golden-block-based self-refining scheme for repetitive patterned wafer inspections. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 13 (xsd:string)