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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mva/KubotaTMS05>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Parag_Talekar>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tangali_S._Sudarshan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Toshiro_Kubota>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xianyun_Ma>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2Fs00138-004-0169-y>
foaf:homepage <https://doi.org/10.1007/s00138-004-0169-y>
dc:identifier DBLP journals/mva/KubotaTMS05 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2Fs00138-004-0169-y (xsd:string)
dcterms:issued 2005 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mva>
rdfs:label A nondestructive automated defect detection system for silicon carbide wafers. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Parag_Talekar>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tangali_S._Sudarshan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Toshiro_Kubota>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xianyun_Ma>
swrc:number 3 (xsd:string)
swrc:pages 170-176 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mva/KubotaTMS05/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mva/KubotaTMS05>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mva/mva16.html#KubotaTMS05>
rdfs:seeAlso <https://doi.org/10.1007/s00138-004-0169-y>
dc:title A nondestructive automated defect detection system for silicon carbide wafers. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 16 (xsd:string)