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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/mva/XieG00>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Pin_Xie>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sheng_Uei_Guan>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2Fs001380050133>
foaf:homepage <https://doi.org/10.1007/s001380050133>
dc:identifier DBLP journals/mva/XieG00 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2Fs001380050133 (xsd:string)
dcterms:issued 2000 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/mva>
rdfs:label A golden-template self-generating method for patterned wafer inspection. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Pin_Xie>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sheng_Uei_Guan>
swrc:number 3 (xsd:string)
swrc:pages 149-156 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/mva/XieG00/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/mva/XieG00>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/mva/mva12.html#XieG00>
rdfs:seeAlso <https://doi.org/10.1007/s001380050133>
dc:subject Wafer inspection; Golden template; Spectral estimation; PDI; Image-to-image reference method (xsd:string)
dc:title A golden-template self-generating method for patterned wafer inspection. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 12 (xsd:string)