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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/nca/ChenJCC14>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hisa-Ping_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hui-Pin_Chang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wen-Chin_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xiao-Yun_Jiang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2Fs00521-013-1353-7>
foaf:homepage <https://doi.org/10.1007/s00521-013-1353-7>
dc:identifier DBLP journals/nca/ChenJCC14 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2Fs00521-013-1353-7 (xsd:string)
dcterms:issued 2014 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/nca>
rdfs:label An effective system for parameter optimization in photolithography process of a LGP stamper. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hisa-Ping_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hui-Pin_Chang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wen-Chin_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xiao-Yun_Jiang>
swrc:number 6 (xsd:string)
swrc:pages 1391-1401 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/nca/ChenJCC14/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/nca/ChenJCC14>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/nca/nca24.html#ChenJCC14>
rdfs:seeAlso <https://doi.org/10.1007/s00521-013-1353-7>
dc:title An effective system for parameter optimization in photolithography process of a LGP stamper. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 24 (xsd:string)