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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/nca/MaP24>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tianhong_Pan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhu_Ma>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2Fs00521-023-09112-9>
foaf:homepage <https://doi.org/10.1007/s00521-023-09112-9>
dc:identifier DBLP journals/nca/MaP24 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2Fs00521-023-09112-9 (xsd:string)
dcterms:issued 2024 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/nca>
rdfs:label DRL-dEWMA: a composite framework for run-to-run control in the semiconductor manufacturing process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tianhong_Pan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhu_Ma>
swrc:month January (xsd:string)
swrc:number 3 (xsd:string)
swrc:pages 1429-1447 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/nca/MaP24/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/nca/MaP24>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/nca/nca36.html#MaP24>
rdfs:seeAlso <https://doi.org/10.1007/s00521-023-09112-9>
dc:title DRL-dEWMA: a composite framework for run-to-run control in the semiconductor manufacturing process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 36 (xsd:string)