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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ors/MorrisonM07>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Donald_P._Martin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/James_R._Morrison>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2Fs00291-006-0061-4>
foaf:homepage <https://doi.org/10.1007/s00291-006-0061-4>
dc:identifier DBLP journals/ors/MorrisonM07 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2Fs00291-006-0061-4 (xsd:string)
dcterms:issued 2007 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ors>
rdfs:label Performance evaluation of photolithography cluster tools. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Donald_P._Martin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/James_R._Morrison>
swrc:number 3 (xsd:string)
swrc:pages 375-389 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ors/MorrisonM07/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ors/MorrisonM07>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ors/ors29.html#MorrisonM07>
rdfs:seeAlso <https://doi.org/10.1007/s00291-006-0061-4>
dc:title Performance evaluation of photolithography cluster tools. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 29 (xsd:string)