[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/pami/ShuLMS88>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ching-Chung_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/David_B._Shu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J._F._Mancuso>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yung-Nien_Sun>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2F34.3875>
foaf:homepage <https://doi.org/10.1109/34.3875>
dc:identifier DBLP journals/pami/ShuLMS88 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2F34.3875 (xsd:string)
dcterms:issued 1988 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/pami>
rdfs:label A Line Extraction Method for Automated SEM Inspection of VLSI Resist. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ching-Chung_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/David_B._Shu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J._F._Mancuso>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yung-Nien_Sun>
swrc:number 1 (xsd:string)
swrc:pages 117-120 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/pami/ShuLMS88/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/pami/ShuLMS88>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/pami/pami10.html#ShuLMS88>
rdfs:seeAlso <https://doi.org/10.1109/34.3875>
dc:subject line extraction method; automated SEM inspection; VLSI resist; precision digital edge-line-detection method; edge contours; submicrometer width; scanning electron microscopy; integrated circuit fabrication; Hough transform; automatic testing; circuit analysis computing; computer vision; computerised picture processing; inspection; integrated circuit testing; scanning electron microscopy; transforms; VLSI (xsd:string)
dc:title A Line Extraction Method for Automated SEM Inspection of VLSI Resist. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 10 (xsd:string)