An Automatic Wafer Inspection System Using Pipelined Image Processing Techniques.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/pami/YodaOTE88
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1988
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An Automatic Wafer Inspection System Using Pipelined Image Processing Techniques.
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dc:
subject
computer vision; defect detection; defect classification; picture processing; pattern recognition; automatic wafer inspection system; pipelined image processing techniques; defective patterns; multilayered wafer patterns; false-alarm rate; comparison method; digital design pattern data; CAD data; 6 micron; 7 MHz; circuit analysis computing; computer vision; computerised pattern recognition; computerised picture processing; fault location; inspection; integrated circuit testing; pipeline processing
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An Automatic Wafer Inspection System Using Pipelined Image Processing Techniques.
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