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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/pieee/BarkerBLW17>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Arthur_W._Lichtenberger>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Matthew_F._Bauwens>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/N._Scott_Barker>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Robert_M._Weikle>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FJPROC.2016.2612191>
foaf:homepage <https://doi.org/10.1109/JPROC.2016.2612191>
dc:identifier DBLP journals/pieee/BarkerBLW17 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FJPROC.2016.2612191 (xsd:string)
dcterms:issued 2017 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/pieee>
rdfs:label Silicon-on-Insulator Substrates as a Micromachining Platform for Advanced Terahertz Circuits. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Arthur_W._Lichtenberger>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Matthew_F._Bauwens>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/N._Scott_Barker>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Robert_M._Weikle>
swrc:number 6 (xsd:string)
swrc:pages 1105-1120 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/pieee/BarkerBLW17/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/pieee/BarkerBLW17>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/pieee/pieee105.html#BarkerBLW17>
rdfs:seeAlso <https://doi.org/10.1109/JPROC.2016.2612191>
dc:title Silicon-on-Insulator Substrates as a Micromachining Platform for Advanced Terahertz Circuits. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 105 (xsd:string)