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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/qre/KimKK10>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Doh-Soon_Kwak>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hyun-Jin_Kim>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kwang-Jae_Kim>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1002%2Fqre.1149>
foaf:homepage <https://doi.org/10.1002/qre.1149>
dc:identifier DBLP journals/qre/KimKK10 (xsd:string)
dc:identifier DOI doi.org%2F10.1002%2Fqre.1149 (xsd:string)
dcterms:issued 2010 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/qre>
rdfs:label A case study on modeling and optimizing photolithography stage of semiconductor fabrication process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Doh-Soon_Kwak>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hyun-Jin_Kim>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kwang-Jae_Kim>
swrc:number 7 (xsd:string)
swrc:pages 765-774 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/qre/KimKK10/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/qre/KimKK10>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/qre/qre26.html#KimKK10>
rdfs:seeAlso <https://doi.org/10.1002/qre.1149>
dc:title A case study on modeling and optimizing photolithography stage of semiconductor fabrication process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 26 (xsd:string)