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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ram/LeeL04>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jin-Hwan_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tae-Eog_Lee>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FMRA.2004.1275965>
foaf:homepage <https://doi.org/10.1109/MRA.2004.1275965>
dc:identifier DBLP journals/ram/LeeL04 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FMRA.2004.1275965 (xsd:string)
dcterms:issued 2004 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ram>
rdfs:label SECAM: a supervisory equipment control application model for integrated semiconductor manufacturing equipment. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jin-Hwan_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tae-Eog_Lee>
swrc:number 1 (xsd:string)
swrc:pages 41-58 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ram/LeeL04/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ram/LeeL04>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ram/ram11.html#LeeL04>
rdfs:seeAlso <https://doi.org/10.1109/MRA.2004.1275965>
dc:title SECAM: a supervisory equipment control application model for integrated semiconductor manufacturing equipment. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 11 (xsd:string)