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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/sensors/AmatoAFFGGGMPTV23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Anestis_Antoniadis>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Antonino_La_Magna>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Caterina_Genua>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Daniele_Pagano>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Domenico_Fazio>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Donatella_Granata>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Gabriele_Tochino>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ir%E2%88%9A%C2%AEne_Gijbels>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Italia_De_Feis>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Patrizia_Vasquez>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Umberto_Amato>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fs23146249>
foaf:homepage <https://doi.org/10.3390/s23146249>
dc:identifier DBLP journals/sensors/AmatoAFFGGGMPTV23 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fs23146249 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/sensors>
rdfs:label Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Anestis_Antoniadis>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Antonino_La_Magna>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Caterina_Genua>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Daniele_Pagano>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Domenico_Fazio>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Donatella_Granata>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Gabriele_Tochino>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ir%E2%88%9A%C2%AEne_Gijbels>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Italia_De_Feis>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Patrizia_Vasquez>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Umberto_Amato>
swrc:month July (xsd:string)
swrc:number 14 (xsd:string)
swrc:pages 6249 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/sensors/AmatoAFFGGGMPTV23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/sensors/AmatoAFFGGGMPTV23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/sensors/sensors23.html#AmatoAFFGGGMPTV23>
rdfs:seeAlso <https://doi.org/10.3390/s23146249>
dc:title Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 23 (xsd:string)