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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/sensors/BoomBHB21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Alessandro_Bertolini>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Boris_A._Boom>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Eric_Hennes>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jo_F._J._van_den_Brand>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fs21072566>
foaf:homepage <https://doi.org/10.3390/s21072566>
dc:identifier DBLP journals/sensors/BoomBHB21 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fs21072566 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/sensors>
rdfs:label Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Alessandro_Bertolini>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Boris_A._Boom>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Eric_Hennes>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jo_F._J._van_den_Brand>
swrc:number 7 (xsd:string)
swrc:pages 2566 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/sensors/BoomBHB21/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/sensors/BoomBHB21>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/sensors/sensors21.html#BoomBHB21>
rdfs:seeAlso <https://doi.org/10.3390/s21072566>
dc:title Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 21 (xsd:string)