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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/sensors/BrandXDLBBAPVFM19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bodo_Mickan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Erwin_Peiner>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Heinrich_Behle>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ilia_Kiselev>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jannick_Langfahl-Klabes>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lutz_Doering>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michael_Drexel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michael_Hauptmannl>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Min_Xu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sebastian_B%E2%88%9A%C4%BEtefisch>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Stefan_V%E2%88%9A%E2%88%82llmeke>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Thomas_Ahbe>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Thomas_Frank>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Uwe_Brand>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fs19061410>
foaf:homepage <https://doi.org/10.3390/s19061410>
dc:identifier DBLP journals/sensors/BrandXDLBBAPVFM19 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fs19061410 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/sensors>
rdfs:label Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 ¬Ķm. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bodo_Mickan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Erwin_Peiner>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Heinrich_Behle>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ilia_Kiselev>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jannick_Langfahl-Klabes>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lutz_Doering>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michael_Drexel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michael_Hauptmannl>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Min_Xu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sebastian_B%E2%88%9A%C4%BEtefisch>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Stefan_V%E2%88%9A%E2%88%82llmeke>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Thomas_Ahbe>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Thomas_Frank>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Uwe_Brand>
swrc:number 6 (xsd:string)
swrc:pages 1410 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/sensors/BrandXDLBBAPVFM19/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/sensors/BrandXDLBBAPVFM19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/sensors/sensors19.html#BrandXDLBBAPVFM19>
rdfs:seeAlso <https://doi.org/10.3390/s19061410>
dc:title Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 ¬Ķm. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 19 (xsd:string)