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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/sensors/FahrbachXNDSLKBP23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Christian_H._Schwalb>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Christian_Kuhlmann_0003>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Erwin_Peiner>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michael_Fahrbach>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Min_Xu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Oleg_Domanov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Uwe_Brand>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wilson_Ombati_Nyang%27au>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhi_Li>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fs23042003>
foaf:homepage <https://doi.org/10.3390/s23042003>
dc:identifier DBLP journals/sensors/FahrbachXNDSLKBP23 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fs23042003 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/sensors>
rdfs:label Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Christian_H._Schwalb>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Christian_Kuhlmann_0003>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Erwin_Peiner>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michael_Fahrbach>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Min_Xu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Oleg_Domanov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Uwe_Brand>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wilson_Ombati_Nyang%27au>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhi_Li>
swrc:month February (xsd:string)
swrc:number 4 (xsd:string)
swrc:pages 2003 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/sensors/FahrbachXNDSLKBP23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/sensors/FahrbachXNDSLKBP23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/sensors/sensors23.html#FahrbachXNDSLKBP23>
rdfs:seeAlso <https://doi.org/10.3390/s23042003>
dc:title Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 23 (xsd:string)