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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/sensors/FanHXB23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Angzhi_Fan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fei_Xu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sthitie_Bom>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yu_Huang_0017>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fs23208363>
foaf:homepage <https://doi.org/10.3390/s23208363>
dc:identifier DBLP journals/sensors/FanHXB23 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fs23208363 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/sensors>
rdfs:label Soft-Sensing Regression Model: From Sensor to Wafer Metrology Forecasting. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Angzhi_Fan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fei_Xu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sthitie_Bom>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yu_Huang_0017>
swrc:month October (xsd:string)
swrc:number 20 (xsd:string)
swrc:pages 8363 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/sensors/FanHXB23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/sensors/FanHXB23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/sensors/sensors23.html#FanHXB23>
rdfs:seeAlso <https://doi.org/10.3390/s23208363>
dc:title Soft-Sensing Regression Model: From Sensor to Wafer Metrology Forecasting. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 23 (xsd:string)